Mechanical/Physical Sensors and Microsystems
Examples: Pressure, inertial, force, thermal, magnetic transducers and microphones, including theory, design, and modeling advances
Materials, Fabrication, and Packaging Technologies
Examples: new fabrication process flows and parameter studies for solid-state material integration, fabrication, packaging and encapsulation (liquid or vacuum); 3D MEMS integration, MEMS compatible TSVs, wafer bonding for MEMS
Nanoscale Devices and Nanomaterials
Examples: Transducers based on nanoscale phenomena; materials with new intrinsic properties for transducers, 1D and 2D materials, e.g. Graphene; device concepts and fabrication process flows, characterization, integration of nanostructured materials.
Transducers with Soft, Flexible or Composite Materials
Examples: Materials with new intrinsic properties, soft, elastic, stretchable or large area devices, such as devices in or on polymers, paper or fabrics, respective devices and fabrication process flows; functional polymers, nanoparticle filled polymers, device concepts and fabrication process flows, characterization, including drift, reliability and aging; wearable transducer systems.
Chemical and Environmental Sensors and Microsystems
Examples: liquid and gas phase sensing, air quality, pollution sensor, particle and pollen sensors, water quality, safety sensors, and micro-scale chemical analysis systems; sensor platforms for environmental sensing.
Bio-Sensors and Bio-Microsystems
Examples: devices and instruments for in vitro measurement and handling of biological samples and bio markers; microsystems-based point of care devices.
Examples: devices and instruments for in vivo measurements, such as implantable devices and transducers, drug delivery systems, micro device/system for clinical use; biodegradable in vivo transducers, transient smart implantable MEMS.
Examples: technologies, devices, and systems for manipulation of fluids, particles, and droplets; acousto-fluidics, opto-fluidics.
Energy and Power MEMS
Examples: microsystems and technologies for energy conversion, storage, and management, energy harvester, micro/nano enhanced solar cell, thermal, mechanical, triboelectric; Zero Power Sensors.
Acoustic Microdevices and RF MEMS
Examples: Acoustic transducers (CMUT, PMUT), photo-/opto-acoustic transducers, ultrasound imaging systems, micro-resonators (SAW, BAW, etc.) switches, tunable power dividers, phase shifters, or filters; Transducer Networks,), oscillators, isolators, circulators, micro relays and probe devices (AFM)
Integrated Photonics and Optical MEMS
Examples: micro spectrometers, SPR based sensor, silicon photonics, fiber- based systems, plasmonic devices, integrated optics, micromirrors and LiDAR systems, tunable soft lenses; micro-/ nano-actuators and robots, DC switches, micro relays and probe devices (AFM), plasmonic devices, metamaterial based transducers, optical resonators
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